SUBSTRATE-SUPPORTING APPARATUS

PROBLEM TO BE SOLVED: To stably carry a substrate holder by making the open angle of a V-shaped groove in a substrate-support apparatus smaller than the chamfer angle at an inner circumferential part of the center hole of a substrate. SOLUTION: Chamfered parts 34 and 36 are formed on both sides of an inner circumferential part of a center hole 24 of a substrate 10, and the chamfer angle α made by them is 90 degrees. An open angle β of a V-shaped groove 54 of a V-shaped groove block 52 is 30 degrees. In this way, the open angle βof a V-shaped groove 54 is made smaller than the chamfer angle α of the center hole 24, so that the substrate 10 is supported stably in the vertical state by the V-shaped groove 54. Composed to the conventional block having β