MICRO PUMP

PROBLEM TO BE SOLVED: To forcibly supply a fluid by expanding a volume of an actuating fluid with a heating mechanism, and evaginating each diaphragm in order, and to miniaturize a device and reduce energy loss by using a heater which is heated to a heating mechanism by current-carrying. SOLUTION: When a delivery rate of a contact agent and an atmosphere temperature are inputted to a control circuit, a first switch 7a is turned on, current flows a heating part 5A, a low boiling point fluid in a hole 2A formed on a substrate 2 is instantly gasified. Accordingly, a diaphragm 6A is expanded, and contact agent in a forcibly supplying space 3a of a flow passage plate 3 flows. The switch is changed, current-carrying is carried out to heating parts 5A, 5B simultaneously, the diaphragms 6A, 6B are evaginated, current-carrying is carried out to the heating parts 5B, 5C, and thereby, the diaphragm 6a is evacuated, and the diaphragms 6B, 6C are expanded. The same operation is repeated, and the contact agent in the forcibly supplying space 3a is delivered from a port 3c.