SUBSTRATE TREATING DEVICE AND SUBSTRATE TREATMENT

PROBLEM TO BE SOLVED: To eliminate the trouble due to the abnormal transport of a mount while a substrate is transported and to obtain a good substrate to be treated in good yield. SOLUTION: This substrate treating device has at least a substrate delivering chamber, in which a mount from a substrate...

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Bibliographische Detailangaben
Hauptverfasser:	YOSHISATO SUNAO, MORIYAMA KOUICHIROU, SHIMODA HIROTSUGU, OTOSHI HIROKAZU, KANAI MASAHIRO
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL CONVEYING DIFFUSION TREATMENT OF METALLIC MATERIAL ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY GAMMA RAY OR X-RAY MICROSCOPES HANDLING THIN OR FILAMENTARY MATERIAL HANDLING THIN OR FILAMENTARY MATERIAL, e.g. SHEETS, WEBS,CABLES INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL IRRADIATION DEVICES METALLURGY NUCLEAR ENGINEERING NUCLEAR PHYSICS PACKING PERFORMING OPERATIONS PHYSICS SEMICONDUCTOR DEVICES STORING SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOTOTHERWISE PROVIDED FOR TRANSPORTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To eliminate the trouble due to the abnormal transport of a mount while a substrate is transported and to obtain a good substrate to be treated in good yield. SOLUTION: This substrate treating device has at least a substrate delivering chamber, in which a mount from a substrate delivering bobbin 105 having a roller on which a strip substrate 102 and the mount 103 are alternately wound is wound on a mount winding bobbin, and the strip substrate is continuously delivered, a substrate treating chamber for treating the substrate, and a substrate winding chamber 101 for winding the substrate and the mount delivered from a mount delivering bobbin on the substrate winding bobbin. Further, at least either one of a mechanism for detecting the abnormal transport of the mount in the substrate delivering chamber and a mechanism for detecting the abnormal transport of the mount in the substrate winding chamber is provided to the device.