SAFETY MECHANISM FOR VACUUM SYSTEM

PROBLEM TO BE SOLVED: To stop supplying power when abnormality or failure occurs in an exhaust system such as a motor, vacuum pump, and transmission belt, and at the same time, to prevent outflow of oil in the vacuum pump into a vacuum container. SOLUTION: A revolution detector 5 detects a revolutio...

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1. Verfasser: HOTEI YUKIHIKO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To stop supplying power when abnormality or failure occurs in an exhaust system such as a motor, vacuum pump, and transmission belt, and at the same time, to prevent outflow of oil in the vacuum pump into a vacuum container. SOLUTION: A revolution detector 5 detects a revolution speed of a vacuum pump 1. When a detected value is below the set vale that is set in a current control circuit 6, the current control circuit 6 cuts off the electricity supply to stop a motor 4. Also, a closing opening 2 opens a vacuum container 7, and let outdoor air or inert gas flow into the vacuum container 7 to recover a normal pressure in the vacuum container 7.