WAFER CARRIER

WAFER CARRIER

PROBLEM TO BE SOLVED: To stably control variations in the surface resistance of molded articles by forming a wafer carrier of polyether aromatic ketone, having a repeating unit expressed by a prescribed formula and of carbon fiber having a prescribed diameter and a prescribed length and by controlli...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SATO TAKASHI, YANAGIHARA KAYAKO, YOSHIMURA MASAJI
Format: Patent
Sprache:eng
Schlagworte:
BASIC ELECTRIC ELEMENTS
CHEMISTRY
COMPOSITIONS BASED THEREON
COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
METALLURGY
ORGANIC MACROMOLECULAR COMPOUNDS
SEMICONDUCTOR DEVICES
THEIR PREPARATION OR CHEMICAL WORKING-UP
USE OF INORGANIC OR NON-MACROMOLECULAR ORGANIC SUBSTANCES ASCOMPOUNDING INGREDIENTS
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To stably control variations in the surface resistance of molded articles by forming a wafer carrier of polyether aromatic ketone, having a repeating unit expressed by a prescribed formula and of carbon fiber having a prescribed diameter and a prescribed length and by controlling the surface resistance of such a wafer carrier within a prescribed narrow range. SOLUTION: This wafer carrier contains 90-60 wt.% of polyether aromatic ketone and 10-40 wt.% of carbon fiber. The polyether aromatic ketone has a repeating unit expressed by a formula. The carbon fiber has an average fiber diameter of 3-25 μm and an average fiber length of 50-70,000 μm. Furthermore, the wafer carrier has a surface resistance R which satisfies the inequality, Rmin