PROCESS FOR ADHERING CRYSTALLINE SUBSTRATE HAVING DIFFERENT CRYSTAL LATTICES
PROBLEM TO BE SOLVED: To prevent the occurrence of an interface state, defects, and traps by a method, wherein a second substrate having a second crystal lattice struc ture is adhered to a first substrate having a first crystal lattice structure to manufacture an optical detector. SOLUTION: A stack...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To prevent the occurrence of an interface state, defects, and traps by a method, wherein a second substrate having a second crystal lattice struc ture is adhered to a first substrate having a first crystal lattice structure to manufacture an optical detector. SOLUTION: A stack 210 as a second substrate having a second lattice structure is adhered on a silicon substrate 205 as a first substrate having a first crystal lattice structure. The stack 210 forms an n--silicon layer 215, and an n-InGaAs 220, a layer of an InP 225, and a layer of silicon dioxide(SiO2) 230, and a gold-beryllium alloy 250 as a p-type metal sequentially laminated and formed thereon. A window 235 is formed in the SiO2 layer 230 within such a stack 210, and zinc is diffused in the inside thereof in order to form a p-n junction 240. |
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