MANUFACTURE OF SPIN VALVE FILM AND MANUFACTURE OF MAGNETORESITIVE EFFECT TYPE MAGNETIC HEAD
PROBLEM TO BE SOLVED: To improve the size of the switched connection magnetic field of a spin valve film. SOLUTION: A first magnetic layer 3, non-magnetic layer 4, second magnetic layer 5, and anti-ferromagnetic layer 6 are laminated in this spin valve film 1, and the second magnetic layer 5 is film...
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Sprache: | eng |
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Zusammenfassung: | PROBLEM TO BE SOLVED: To improve the size of the switched connection magnetic field of a spin valve film. SOLUTION: A first magnetic layer 3, non-magnetic layer 4, second magnetic layer 5, and anti-ferromagnetic layer 6 are laminated in this spin valve film 1, and the second magnetic layer 5 is film-formed at a prescribed film formation rate according to materials of which the anti-ferromagnetic layer 6 is formed. In forming the anti-ferromagnetic layer 6 of Ir/Mn alloy, the second magnetic layer 5 is formed at a film formation rate which is 0.078 nm/s or less. Also, in forming the anti-ferromagnetic layer 6 of Rh/Mn alloy, the second magnetic layer 5 is formed at a film formation rate which is 0.181 nm/s or less. |
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