CARBON FILM OF HIGH ORIENTATION AND ITS PRODUCTION

PROBLEM TO BE SOLVED: To obtain a carbon film of high orientation by forming the carbon film in which faces of graphite layers perpendicular to the C-axis are strongly oriented. SOLUTION: This carbon film is preferably formed on the surface of a base body and has graphite layers perpendicular to the...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	OGA SHINICHI, ISHIKURA TAKEFUMI, YAMASHITA SATOSHI
Format:	Patent
Sprache:	eng
Schlagworte:	CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COMPOUNDS THEREOF DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL INORGANIC CHEMISTRY METALLURGY NON-METALLIC ELEMENTS SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION
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