CARRIER EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING IT
PROBLEM TO BE SOLVED: To carry a wafer to a fixed position without depending on a projection amount of a wafer by comparing and operating a difference between a first address and an operated central position of a wafer, obtaining a displacement amount which is a difference between a load central pos...
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| creator | KASHIMA HIDEO KANETOMO MASABUMI MATSUMURA YASUHIDE |
| description | PROBLEM TO BE SOLVED: To carry a wafer to a fixed position without depending on a projection amount of a wafer by comparing and operating a difference between a first address and an operated central position of a wafer, obtaining a displacement amount which is a difference between a load central position of a carrier and a central position of a wafer and correcting a fourth address according to the displacement amount. SOLUTION: A detection sensor 17 which detects an edge face of a wafer 12 is provided to a desired position, a carrier 1 is extended and moved to a first address, an extension movement amount of the carrier 1 is operated from a rotation amount of a driving source 8b when the carrier 1 is made to enter a cassette, a radius of a known wafer 12 is added to the extension movement amount, a difference between a central position of the wafer 12 loaded in a cassette and an operated central position of the wafer 12 is compared and operated, a displacement amount which is a difference between a load central position of the carrier 1 and a central position of the wafer 12 is obtained, a fourth address is corrected according to the displacement amount and the fourth address is stored in a controller 5. |
| format | Patent |
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SOLUTION: A detection sensor 17 which detects an edge face of a wafer 12 is provided to a desired position, a carrier 1 is extended and moved to a first address, an extension movement amount of the carrier 1 is operated from a rotation amount of a driving source 8b when the carrier 1 is made to enter a cassette, a radius of a known wafer 12 is added to the extension movement amount, a difference between a central position of the wafer 12 loaded in a cassette and an operated central position of the wafer 12 is compared and operated, a displacement amount which is a difference between a load central position of the carrier 1 and a central position of the wafer 12 is obtained, a fourth address is corrected according to the displacement amount and the fourth address is stored in a controller 5.</description><edition>7</edition><language>eng</language><subject>BASIC ELECTRIC ELEMENTS ; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ; ELECTRICITY ; SEMICONDUCTOR DEVICES</subject><creationdate>2000</creationdate><oa>free_for_read</oa><woscitedreferencessubscribed>false</woscitedreferencessubscribed></display><links><openurl>$$Topenurl_article</openurl><openurlfulltext>$$Topenurlfull_article</openurlfulltext><thumbnail>$$Tsyndetics_thumb_exl</thumbnail><linktohtml>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20000606&DB=EPODOC&CC=JP&NR=2000156394A$$EHTML$$P50$$Gepo$$Hfree_for_read</linktohtml><link.rule.ids>230,308,776,881,25543,76292</link.rule.ids><linktorsrc>$$Uhttps://worldwide.espacenet.com/publicationDetails/biblio?FT=D&date=20000606&DB=EPODOC&CC=JP&NR=2000156394A$$EView_record_in_European_Patent_Office$$FView_record_in_$$GEuropean_Patent_Office$$Hfree_for_read</linktorsrc></links><search><creatorcontrib>KASHIMA HIDEO</creatorcontrib><creatorcontrib>KANETOMO MASABUMI</creatorcontrib><creatorcontrib>MATSUMURA YASUHIDE</creatorcontrib><title>CARRIER EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING IT</title><description>PROBLEM TO BE SOLVED: To carry a wafer to a fixed position without depending on a projection amount of a wafer by comparing and operating a difference between a first address and an operated central position of a wafer, obtaining a displacement amount which is a difference between a load central position of a carrier and a central position of a wafer and correcting a fourth address according to the displacement amount. SOLUTION: A detection sensor 17 which detects an edge face of a wafer 12 is provided to a desired position, a carrier 1 is extended and moved to a first address, an extension movement amount of the carrier 1 is operated from a rotation amount of a driving source 8b when the carrier 1 is made to enter a cassette, a radius of a known wafer 12 is added to the extension movement amount, a difference between a central position of the wafer 12 loaded in a cassette and an operated central position of the wafer 12 is compared and operated, a displacement amount which is a difference between a load central position of the carrier 1 and a central position of the wafer 12 is obtained, a fourth address is corrected according to the displacement amount and the fourth address is stored in a controller 5.</description><subject>BASIC ELECTRIC ELEMENTS</subject><subject>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</subject><subject>ELECTRICITY</subject><subject>SEMICONDUCTOR DEVICES</subject><fulltext>true</fulltext><rsrctype>patent</rsrctype><creationdate>2000</creationdate><recordtype>patent</recordtype><sourceid>EVB</sourceid><recordid>eNrjZHBxdgwK8nQNUnANDPUM8HX1C1Fw9HNRCHb19XT293MJdQ7xD1LwdfQLdXN0DgkN8vRzR1IZGgzie4bwMLCmJeYUp_JCaW4GJTfXEGcP3dSC_PjU4oLE5NS81JJ4rwAjAwMDQ1MzY0sTR2OiFAEA4SQsnA</recordid><startdate>20000606</startdate><enddate>20000606</enddate><creator>KASHIMA HIDEO</creator><creator>KANETOMO MASABUMI</creator><creator>MATSUMURA YASUHIDE</creator><scope>EVB</scope></search><sort><creationdate>20000606</creationdate><title>CARRIER EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING IT</title><author>KASHIMA HIDEO ; KANETOMO MASABUMI ; MATSUMURA YASUHIDE</author></sort><facets><frbrtype>5</frbrtype><frbrgroupid>cdi_FETCH-epo_espacenet_JP2000156394A3</frbrgroupid><rsrctype>patents</rsrctype><prefilter>patents</prefilter><language>eng</language><creationdate>2000</creationdate><topic>BASIC ELECTRIC ELEMENTS</topic><topic>ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR</topic><topic>ELECTRICITY</topic><topic>SEMICONDUCTOR DEVICES</topic><toplevel>online_resources</toplevel><creatorcontrib>KASHIMA HIDEO</creatorcontrib><creatorcontrib>KANETOMO MASABUMI</creatorcontrib><creatorcontrib>MATSUMURA YASUHIDE</creatorcontrib><collection>esp@cenet</collection></facets><delivery><delcategory>Remote Search Resource</delcategory><fulltext>fulltext_linktorsrc</fulltext></delivery><addata><au>KASHIMA HIDEO</au><au>KANETOMO MASABUMI</au><au>MATSUMURA YASUHIDE</au><format>patent</format><genre>patent</genre><ristype>GEN</ristype><title>CARRIER EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING IT</title><date>2000-06-06</date><risdate>2000</risdate><abstract>PROBLEM TO BE SOLVED: To carry a wafer to a fixed position without depending on a projection amount of a wafer by comparing and operating a difference between a first address and an operated central position of a wafer, obtaining a displacement amount which is a difference between a load central position of a carrier and a central position of a wafer and correcting a fourth address according to the displacement amount. 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| subjects | BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY SEMICONDUCTOR DEVICES |
| title | CARRIER EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING IT |
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