CARRIER EQUIPMENT AND SEMICONDUCTOR MANUFACTURING EQUIPMENT USING IT

PROBLEM TO BE SOLVED: To carry a wafer to a fixed position without depending on a projection amount of a wafer by comparing and operating a difference between a first address and an operated central position of a wafer, obtaining a displacement amount which is a difference between a load central position of a carrier and a central position of a wafer and correcting a fourth address according to the displacement amount. SOLUTION: A detection sensor 17 which detects an edge face of a wafer 12 is provided to a desired position, a carrier 1 is extended and moved to a first address, an extension movement amount of the carrier 1 is operated from a rotation amount of a driving source 8b when the carrier 1 is made to enter a cassette, a radius of a known wafer 12 is added to the extension movement amount, a difference between a central position of the wafer 12 loaded in a cassette and an operated central position of the wafer 12 is compared and operated, a displacement amount which is a difference between a load central position of the carrier 1 and a central position of the wafer 12 is obtained, a fourth address is corrected according to the displacement amount and the fourth address is stored in a controller 5.