MANUFACTURE OF PHOTOVOLTAIC ELEMENT

PROBLEM TO BE SOLVED: To provide the manufacturing method of a photovoltaic element, which is high in photoelectric conversion efficiency, is little in optical degradation, is low in cost and is superior in mass-productivity. SOLUTION: This manufacture method of a photovoltaic element of a structure, wherein at least more than one of pin structures formed by laminating N-type, I-type and P-type semiconductor layers are repeatedly provided on a substrate, has at least more than one of steps α for forming the pin structures by deposition one semiconductor layer of the N-type, I-type and P-type semiconductor layers on the substrate at substrate temperature range of 100 to 500 deg.C, at least more than one of substrate cooling steps β for cooling the substrate at a substrate temperature of Ts