DETECTOR FOR DETECTING NONDESTRUCTIVELY INTERNAL DEFECT FOR ELECTRONIC DEVICE

PROBLEM TO BE SOLVED: To detect a defect inside an electronic device having multi-film structure without destructing the electronic device, and to shorten the time required for detection. SOLUTION: An internal cylinder 30 is arranged coaxially in an external cylinder 31, and a sample 10 as an electronic device is irradiated with an ion beam Ii of a light element having a path along a center axis of the internal cylinder 30 to generate recoil ions Io in a wiring inside the sample 10. The recoil ions Io come into a space between the internal cylinder 30 and the external cylinder 31, and the recoil ions within a range having a prescribed recoil angle are extracted by annular slit inside the space. The recoil ions having a specified recoil angle are selected out of the extracted recoil ions by an energy filter 33, and is detected by an annular ion detector 34 arranged inside the same space. The ion detector counts the incident recoil ions in every energy level to display the distribution of counted values hereinbefore with respect to the energy as energy spectra to a monitor.