DEVICE FOR HOLDING LENS

PROBLEM TO BE SOLVED: To coat sufficiently uniform even in using a facility where a covering source is not arranged at the center below a substrate support body, but arranged outside the center, i.e., aside the axis of rotation of an umbrella-shaped substrate body. SOLUTION: Centering holes which ar...

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Bibliographische Detailangaben
Hauptverfasser: GRIES HERBERT, LOCHER STEFAN
Format: Patent
Sprache:eng
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To coat sufficiently uniform even in using a facility where a covering source is not arranged at the center below a substrate support body, but arranged outside the center, i.e., aside the axis of rotation of an umbrella-shaped substrate body. SOLUTION: Centering holes which are provided in a substrate holder 4 and surrounds a cylindrical circumferential edge part of lenses 3 and 3' are positionally adjusted approximately toward a covering source, the center perpendicular line M of the longitudinal axis A of each hole is intersected with the axis R of rotation of the substrate holder 4 at a specified point O, the point O is located approximately at the center between two intersections C and F of perpendicular axes M' and M" of two imaginary holes of a partial circle T having the longitudinal axis across the covering source with the axis R of rotation. However, one imaginary hole has a maximum space to the covering source, while the other imaginary hole has a minimum space to the covering source Q.