GALVANO-MIRROR DRIVE DEVICE

PROBLEM TO BE SOLVED: To adjust precisely an irradiative position of a laser beam in a short time without being affected by a change of a peripheral ambient temp. and without causing an error due to judgement of a worker. SOLUTION: This drive device is constituted so that a light receiving sensor 9...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: ISHIJIMA MAKOTO, NAGANO YOSHIYA
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To adjust precisely an irradiative position of a laser beam in a short time without being affected by a change of a peripheral ambient temp. and without causing an error due to judgement of a worker. SOLUTION: This drive device is constituted so that a light receiving sensor 9 detects the irradiative position of a laser beam 4, and the drive device decides whether or not the irradiative position of the laser beam 4 reflected by Galvano- mirrors 5, 6 coincides with the prescribed irradiative position based on the output of the light receiving sensor 9, and when it is decided that they disagree, the drive device calculates a correction amount required for making the irradiative position of the laser beam 4 coincide with the prescribed irradiative position, and drives the Galvano-mirrors 5, 6 based on the calculated correction amount to adjust the irradiative position of the laser beam 4.