OPTICAL MEASURING EQUIPMENT AND SAMPLE MEASURING TABLE USED FOR THE EQUIPMENT

PROBLEM TO BE SOLVED: To measure the required dimensions of samples having various shapes correctly while suppressing error as much as possible. SOLUTION: The optical measuring equipment comprises a measuring table 2 for mounting a sample S, and a microscope 3 for observing the sample S and measures...

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1. Verfasser: MINAGAWA AKIRA
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To measure the required dimensions of samples having various shapes correctly while suppressing error as much as possible. SOLUTION: The optical measuring equipment comprises a measuring table 2 for mounting a sample S, and a microscope 3 for observing the sample S and measures the required dimensions of the samples S based on the horizontal movement of the microscope 3. A light source 4 for irradiating the sample is disposed on the lower side of the measuring table 2 and a layer 5 for diffusing the light incoming from the light source 4 is formed at the upper part. Consequently, the outline of the sample S is made clear at the time of observation through the microscope 3 which can thereby be moved accurately through a measuring section.