MAGNETO-RESISTIVE HEAD AND MAGNETIC DISK DEVICE

PROBLEM TO BE SOLVED: To improve corrosion resistance by forming electrodes for signal detection of Nb, Ta, Cr or alloys mainly composed of these materials. SOLUTION: A lower shielding film 2 consisting of NiFe and a first gas gap film 3 consisting of SiO2 are laminated on a substrate 1 formed by us...

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Bibliographische Detailangaben
Hauptverfasser: MORIWAKI HIDETOSHI, KOYAMA NAOKI, YUHITO ISAMU
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To improve corrosion resistance by forming electrodes for signal detection of Nb, Ta, Cr or alloys mainly composed of these materials. SOLUTION: A lower shielding film 2 consisting of NiFe and a first gas gap film 3 consisting of SiO2 are laminated on a substrate 1 formed by using an Al2O3.Tic plate. In succession, a magneto-resistive film 4 consisting of an NiFe alloy thin film is deposited thereon in such a manner that its film thickness attains 0.04 μm. This film is than patterned to a rectangular shape by a photolithography technique. An Nb film is thereafter deposited and is patterned, by which electrodes 5a, 5b for signal detection are formed. Low- electric resistance films 6 of Cu are formed on the electrodes 5a, 5b for signal detection. Second gap layers (SiO2) and soft film upper shielding films (NiFe) for impressing bias magnetic fields are formed on these patterns. The materials exposed on the sliding surfaces with the recording medium turn to Al2O3.Tic, SiO2, NiFe and Nb having the high corrosion resistance. The probability that these materials corrode during use is extremely lessened.