PURIFYING METHOD OF TUNGSTEN HEXAFLUORIDE

PURIFYING METHOD OF TUNGSTEN HEXAFLUORIDE

PROBLEM TO BE SOLVED: To efficiently separate impurities of a low boiling point component in tungsten hexafluoride and to safely obtain a high purity product. SOLUTION: Tungsten hexafluoride containing a low boiling point component as main impurities is cooled and solidified in a vessel 1, and in th...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: YASUTAKE TAKESHI, KOHARA SADAICHI, HARADA ISAO
Format: Patent
Sprache:eng
Schlagworte:
CHEMISTRY
COMPOUNDS CONTAINING METALS NOT COVERED BY SUBCLASSESC01D OR C01F
INORGANIC CHEMISTRY
METALLURGY
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Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To efficiently separate impurities of a low boiling point component in tungsten hexafluoride and to safely obtain a high purity product. SOLUTION: Tungsten hexafluoride containing a low boiling point component as main impurities is cooled and solidified in a vessel 1, and in this state, the vessel is evacuated. Or tungsten hexafluoride containing a low boiling point component as main impurities is cooled and solidified in a vessel 1, and in this state, the vessel is evacuated. After that, the tungsten hexafluoride is vaporized in the vessel, and cooled again and solidified. In this state, the vessel is evacuated.