SIDE WALL REMOVING LIQUID

PROBLEM TO BE SOLVED: To provide a side wall removing liquid capable of easily removing the side wall at low cost and low temperature in a short time in one process without corroding a wiring material. SOLUTION: The side wall removing liquid, preferably, can use at least one kind of oxidant selected...

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Bibliographische Detailangaben
Hauptverfasser:	SUGIYAMA TSUTOMU, MIYAHARA KUNIAKI, OGATA FUJIMARO
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS SEMICONDUCTOR DEVICES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a side wall removing liquid capable of easily removing the side wall at low cost and low temperature in a short time in one process without corroding a wiring material. SOLUTION: The side wall removing liquid, preferably, can use at least one kind of oxidant selected from a group comprising ozone, hydrogen peroxide, hypochlorus acid or hypochlorite, chlorus acid or chlorite, perchloric acid or perchlorate, hypobromus acid or hypobromite, bromus acid or bromite, perbromic acid or perbromite, hypoiodus acid or hypoiodite, iodus acid or iodite, and the like.