ALIGNER AND PRESSURE CONTROL METHOD FOR PROJECTION OPTICAL SYSTEM

PROBLEM TO BE SOLVED: To surely prevent an optical system from increasing in the inside pressure, while a specific gas is being supplied. SOLUTION: A specific gas (for instance, nitrogen gas) is supplied from a gas supply feed device through the intermediary of feed paths 58, 60, and 62 to an optica...

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Bibliographische Detailangaben
Hauptverfasser:	MIYAKE TOSHIHIRO, AKAGAWA KATSUYUKI
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR BASIC ELECTRIC ELEMENTS CINEMATOGRAPHY CONTROLLING ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MATERIALS THEREFOR ORIGINALS THEREFOR PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHYSICS REGULATING SEMICONDUCTOR DEVICES SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To surely prevent an optical system from increasing in the inside pressure, while a specific gas is being supplied. SOLUTION: A specific gas (for instance, nitrogen gas) is supplied from a gas supply feed device through the intermediary of feed paths 58, 60, and 62 to an optical system PL which is arranged in the optical path of a lighting beam. Solenoid valves 80, 97, and 88 which open/close branching paths 78, 99, and 86 provided to the feed paths 58, 60, and 62 are opened by a control device, when the pressure of specific gas exceeds a prescribed value while specific gas is being supplied. With this setup, an optical system can be surely prevented from increasing in the inside pressure while a specific gas is being supplied.