CERAMIC BOARD SUPPORTER WITH SURFACE COMPRISING MATERIAL WHICH REDUCES DONOR EFFECT AND MANUFACTURE THEREOF

CERAMIC BOARD SUPPORTER WITH SURFACE COMPRISING MATERIAL WHICH REDUCES DONOR EFFECT AND MANUFACTURE THEREOF

PROBLEM TO BE SOLVED: To form a surface which resists donor effect of impurities wherein oxygen, carbon, etc., are dissolved by controlling surface conductivity, by introducing a material which reduces donor effect into a supporter surface of a board supporter. SOLUTION: A ceramic body with a suppor...

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Bibliographische Detailangaben
1. Verfasser: TZOU EUGENE
Format: Patent
Sprache:eng
Schlagworte:
ARTIFICIAL STONE
BASIC ELECTRIC ELEMENTS
CEMENTS
CERAMICS
CHEMISTRY
COMPOSITIONS THEREOF, e.g. MORTARS, CONCRETE OR LIKE BUILDINGMATERIALS
CONCRETE
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
LIME, MAGNESIA
METALLURGY
REFRACTORIES
SEMICONDUCTOR DEVICES
SLAG
TREATMENT OF NATURAL STONE
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Zusammenfassung:PROBLEM TO BE SOLVED: To form a surface which resists donor effect of impurities wherein oxygen, carbon, etc., are dissolved by controlling surface conductivity, by introducing a material which reduces donor effect into a supporter surface of a board supporter. SOLUTION: A ceramic body with a supporting surface comprising a material which reduces donor effect has a first part 102 and a second part 112 arranged on the first part 102. Alkaline metallic oxide which reduces donor effect is mixed inside the second part 112. Alkaline metallic oxide which is a material to reduce donor effect is beryllium, magnesium, calcium, strontium, etc., and it reacts with oxygen or carbon existing during use of a chuck 100 and forms a mixture which is stable and does not give electron in the chuck 100. Donor effect of electron is thereby reduced, thus preventing chucking force from disappearing permanently.