PROBE CARD

PROBLEM TO BE SOLVED: To provide a probe card capable of surely discriminating between a positioning member to be a reference (probe terminal) and the other probe terminals for surely making alignment of the probe terminals with the electrode of an inspected body without fail. SOLUTION: This probe c...

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Bibliographische Detailangaben
Hauptverfasser:	MORISHITA HIROSHI, MARUMO HIROSHI
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY MEASURING MEASURING ELECTRIC VARIABLES MEASURING MAGNETIC VARIABLES PHYSICS SEMICONDUCTOR DEVICES TESTING
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Beschreibung
Zusammenfassung:	PROBLEM TO BE SOLVED: To provide a probe card capable of surely discriminating between a positioning member to be a reference (probe terminal) and the other probe terminals for surely making alignment of the probe terminals with the electrode of an inspected body without fail. SOLUTION: This probe card 22 is formed to bring a plurality of probes 221, 222 into contact with respective corresponding electrode pads for making the inspection of electrical characteristics. In this case, a reference probe 221 used for making alignment of respective probes 221, 222 with respective electrodes is coated with a luminous paint so as to provide a light emitting part 221C.