ETCHING METHOD FOR CONDUCTIVE LAYER

PROBLEM TO BE SOLVED: To effect chemical etching which exhibits better performance and which is more flexible, simpler and quick in practice by depositing a mask containing a hot melt ink on a layer to be etched. SOLUTION: An SnO2: F layer 2 is spread over a glass substrate. A hot melt ink is direct...

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description PROBLEM TO BE SOLVED: To effect chemical etching which exhibits better performance and which is more flexible, simpler and quick in practice by depositing a mask containing a hot melt ink on a layer to be etched. SOLUTION: An SnO2: F layer 2 is spread over a glass substrate. A hot melt ink is directly deposited into a desired pattern by ink jet printing, thereby forming a mask 3. Then, Zn (or Al) powder 4 is deposited on the surface of the mask 3. Then, a solution having acidic pH is deposited on the surface of the mask 3 (in the case of the Al powder, a solution having alkaline pH is used). Nascent hydrogen such as to form the layer 2 into an unmasked region 2' is produced, thereby cleaning the substrate. Then, the mask 3 is removed, and the layer 2 etched in correspondence to the pattern defined by the mask 3, i.e., a strip having the desired pattern is obtained. As a result, chemical etching that is more flexible, simpler and quick in practice can be effected.
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SOLUTION: An SnO2: F layer 2 is spread over a glass substrate. A hot melt ink is directly deposited into a desired pattern by ink jet printing, thereby forming a mask 3. Then, Zn (or Al) powder 4 is deposited on the surface of the mask 3. Then, a solution having acidic pH is deposited on the surface of the mask 3 (in the case of the Al powder, a solution having alkaline pH is used). Nascent hydrogen such as to form the layer 2 into an unmasked region 2' is produced, thereby cleaning the substrate. Then, the mask 3 is removed, and the layer 2 etched in correspondence to the pattern defined by the mask 3, i.e., a strip having the desired pattern is obtained. 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SOLUTION: An SnO2: F layer 2 is spread over a glass substrate. A hot melt ink is directly deposited into a desired pattern by ink jet printing, thereby forming a mask 3. Then, Zn (or Al) powder 4 is deposited on the surface of the mask 3. Then, a solution having acidic pH is deposited on the surface of the mask 3 (in the case of the Al powder, a solution having alkaline pH is used). Nascent hydrogen such as to form the layer 2 into an unmasked region 2' is produced, thereby cleaning the substrate. Then, the mask 3 is removed, and the layer 2 etched in correspondence to the pattern defined by the mask 3, i.e., a strip having the desired pattern is obtained. As a result, chemical etching that is more flexible, simpler and quick in practice can be effected.</abstract><edition>7</edition><oa>free_for_read</oa></addata></record>
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subjects BASIC ELECTRIC ELEMENTS
CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS
CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS
CHEMICAL SURFACE TREATMENT
CHEMISTRY
COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
COATING MATERIAL WITH METALLIC MATERIAL
COATING METALLIC MATERIAL
DIFFUSION TREATMENT OF METALLIC MATERIAL
ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
ELECTRICITY
GLASS
INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL
JOINING GLASS TO GLASS OR OTHER MATERIALS
MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
METALLURGY
MINERAL OR SLAG WOOL
MULTI-STEP PROCESSES FOR SURFACE TREATMENT OF METALLICMATERIAL INVOLVING AT LEAST ONE PROCESS PROVIDED FOR IN CLASSC23 AND AT LEAST ONEPROCESS COVERED BY SUBCLASS C21D OR C22F OR CLASS C25
NON-MECHANICAL REMOVAL OF METALLIC MATERIAL FROM SURFACE
PRINTED CIRCUITS
SEMICONDUCTOR DEVICES
SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS
SURFACE TREATMENT OF GLASS
title ETCHING METHOD FOR CONDUCTIVE LAYER
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