SPECTRAL ANALYSIS METHOD FOR ENERGY OF CHARGED PARTICLES

PROBLEM TO BE SOLVED: To measure the charge of a sample under a controlled condition to provide an energy spectrum in an accurate position with a stable peak shape all the time, when the energy of a charged particle is dispersed into its spectral components to be measured. SOLUTION: A sample is pulv...

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1. Verfasser: SATORI KOTARO
Format: Patent
Sprache:eng
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Zusammenfassung:PROBLEM TO BE SOLVED: To measure the charge of a sample under a controlled condition to provide an energy spectrum in an accurate position with a stable peak shape all the time, when the energy of a charged particle is dispersed into its spectral components to be measured. SOLUTION: A sample is pulverized, and resulting pulverized powder 1 is used for analysis in a state that the powder 1 is embedded into a conductive material 2, in a energy spectral analysis method of a charged particle where energy of the charged particle is dispersed into its spectral components in an Auger electron spectroscopy or an X-ray electron spectroscopy to be measured.