GAS-DISCHARGE TYPE DISPLAY DEVICE AND ITS MANUFACTURE

PROBLEM TO BE SOLVED: To improve particularly optical characteristics such as bright field contrast and the migration life by providing a first electrode consisting of a first substrate and a transparent electrode, first metal thin film and second metal thin film successively laminated thereon. SOLU...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: NISHIKAME MASASHI, SATO RYOHEI, KAWAI MICHIFUMI, IJUIN MASAHITO
Format: Patent
Sprache:eng
Schlagworte:
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:PROBLEM TO BE SOLVED: To improve particularly optical characteristics such as bright field contrast and the migration life by providing a first electrode consisting of a first substrate and a transparent electrode, first metal thin film and second metal thin film successively laminated thereon. SOLUTION: A bus electrode comprises a front substrate 400 and a transparent electrode 600, first metal thin film electrode 701, and second metal thin film electrode 702 laminated thereon. Cr is laminated in (100-2000)×10-10 m for the first metal thin film electrode 701, Cu is laminated in 1-3 μm for the second metal thin film electrode 702, and Cr is laminated in (1000-2000)×10-10 m for the top layer. The upper layer Cr is laser machined, the Cr pattern is resisted to etch the lower layer Cu, and the Cu pattern is further resisted to etch the bottom layer Cr. In the etching of the bottom layer Cr, the top layer Cr is extinguished to form a prescribed pattern.