GAS-DISCHARGE TYPE DISPLAY DEVICE AND ITS MANUFACTURE
PROBLEM TO BE SOLVED: To improve particularly optical characteristics such as bright field contrast and the migration life by providing a first electrode consisting of a first substrate and a transparent electrode, first metal thin film and second metal thin film successively laminated thereon. SOLU...
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Zusammenfassung: | PROBLEM TO BE SOLVED: To improve particularly optical characteristics such as bright field contrast and the migration life by providing a first electrode consisting of a first substrate and a transparent electrode, first metal thin film and second metal thin film successively laminated thereon. SOLUTION: A bus electrode comprises a front substrate 400 and a transparent electrode 600, first metal thin film electrode 701, and second metal thin film electrode 702 laminated thereon. Cr is laminated in (100-2000)×10-10 m for the first metal thin film electrode 701, Cu is laminated in 1-3 μm for the second metal thin film electrode 702, and Cr is laminated in (1000-2000)×10-10 m for the top layer. The upper layer Cr is laser machined, the Cr pattern is resisted to etch the lower layer Cu, and the Cu pattern is further resisted to etch the bottom layer Cr. In the etching of the bottom layer Cr, the top layer Cr is extinguished to form a prescribed pattern. |
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