HEATING MEMBER

PROBLEM TO BE SOLVED: To evade the change with the time elapsed of the surface such as the growth of an oxidized film and to enable the stable feed of heat, by forming a chemically stable surface-modified layer on the surface of a heating board made of metal, arranged in contact with or nearer to the object to be heated and heating it, by a diffuse infiltration treatment. SOLUTION: A heating board, e.g. consisting of an Ni base superalloy is subjected to the diffuse infiltration treatment of Cr to form a surface-modified layer composed of a Cr-diffused layer having a chromium oxide layer and provided with oxidation resistance, corrosion resistance, strength, hardness, wear resistance or the like on the surface with tight adhesion. This heating board 18 is welded and fitted to a heat generating board 32 provided with a heating element 30 such as a sheathed resistor heater and is screwed and fixed to a supporting frame 16, and, moreover, a thermocouple 26 is disposed on a recess 28 via a column 10 to form a substrate supporting body. This substrate supporting body is disposed in a film forming chamber of a film forming device, a substrate W is placed on the heating board 18, and, while heating is executed, a gaseous starting material produced by a vaporizer is introduced therein to stably execute film formation on the substrate W.