DISPOSITIVO DI MEMORIA A SEMICONDUTTORE E PROCEDIMENTO PER LA SUA FABBRICAZIONE

PURPOSE:To prevent edges of a chip from being broken when the chip is subjected to a dicing by the use of a silicon wafer, wherein the main surface of the silicon wafer is a {100} plane and four peripheral side surfaces of the same are {110} planes, so that a thin capacitor can have four peripheral...

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Bibliographische Detailangaben
1. Verfasser: YASUE TAKAO
Format: Patent
Sprache:ita
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