MISURE E CONTROLLO DI TEMPERATURE PER PROCESSI FOTOTERMICI

The temperature of a surface undergoing a radiation assisted thermally driven process is sensed by observation of the thermal emission from that surface and used to control the process. In a preferred embodiment, the blue edge of the thermal emission spectral distribution is detected to determine th...

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Bibliographische Detailangaben
Hauptverfasser:	PENNEY CARL MURRAY, CHANDE TUSHAR SHASHIKANT
Format:	Patent
Sprache:	ita
Schlagworte:	CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOIDCHEMISTRY CHEMICAL SURFACE TREATMENT CHEMISTRY COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATIONOR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY IONIMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL COATING MATERIAL WITH METALLIC MATERIAL COATING METALLIC MATERIAL COLORIMETRY DIFFUSION TREATMENT OF METALLIC MATERIAL INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION INGENERAL MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT,POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRA-RED,VISIBLE OR ULTRA-VIOLET LIGHT MEASURING METALLURGY PERFORMING OPERATIONS PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL PHYSICS RADIATION PYROMETRY SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THESURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION TESTING THEIR RELEVANT APPARATUS TRANSPORTING
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Beschreibung
Zusammenfassung:	The temperature of a surface undergoing a radiation assisted thermally driven process is sensed by observation of the thermal emission from that surface and used to control the process. In a preferred embodiment, the blue edge of the thermal emission spectral distribution is detected to determine the surface temperature of a workpiece during a process such as laser-assisted chemical vapor deposition, and used to control this temperature. The temperature measuring system has means for focusing workpiece thermal emission and defining the field of view, a spectrometer to separate shorter wavelength light from other spectral components of the thermal emission, and a photon-counting system to detect the shorter wavelength light and generate a surface temperature signal. Systems to determine surface temperature at a spot and along a line have an optical prism to disperse the thermal emission into component wavelengths, and a multichannel photon-counting detector comprised of an intensified photodetector array.