DISPOSITIVO SENSORE DI IDROGENO DEL TIPO MISFET

Sensor device for gases containing hydrogen consisting of a FET with palladium port deposited on a new type of insulator and a micro-heater. Herein described is the fabrication procedure and examples regarding the possible utilization.

Gespeichert in:

Bibliographische Detailangaben
Hauptverfasser:	CHIARELLI FRANCO, LUPOLI MAURO, COLILLI RENATO, SOLMI SANDRO, CAMANZI ALBERTO, SEVERI MAURIZIO
Format:	Patent
Sprache:	ita
Schlagworte:	BASIC ELECTRIC ELEMENTS ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS SEMICONDUCTOR DEVICES TESTING
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!

Beschreibung
Zusammenfassung:	Sensor device for gases containing hydrogen consisting of a FET with palladium port deposited on a new type of insulator and a micro-heater. Herein described is the fabrication procedure and examples regarding the possible utilization.