CAPSULA MONOMETRICA

A pressure measuring element includes a plate-shaped substrate of ceramic material and a membrane deformable in response to pressure fluctuations. The membrane is made of ceramic material and is mounted to the upper side of the substrate. A pressure-sensitive resistor for measuring pressure is posit...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: GUNTHER STECHER, HANS JOACHIM GLAS, HANS HECHT, KURT SPITZENBERGER, KLAUS MULLER
Format: Patent
Sprache:ita
Schlagworte:
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Beschreibung
Zusammenfassung:A pressure measuring element includes a plate-shaped substrate of ceramic material and a membrane deformable in response to pressure fluctuations. The membrane is made of ceramic material and is mounted to the upper side of the substrate. A pressure-sensitive resistor for measuring pressure is positioned inside the membrane. A heating resistor element is positioned on the underside of the substrate, which maintains the temperature of the substrate constant. A temperature sensor is also arrayed on the upper side of the substrate near the membrane.