METODO DI DETERMINAZIONE DEI PARAMETRI GEOMETRICI DELLA SUPERFICIE DI UN OGGETTO E DISPOSITIVO PER LA SUA REALIZZAZIONE

The method involves deriving the change in a third coordinate from the number of interference pattern lines at a point defined by two further coordinates. One interference line is marked to define a reference null line and a corresp. spatial position of an interference extreme measured. The spatial distribution is measured from distances between all extremes along the third coordinate. The increments in the third coordinate are determined by summing the extreme separations between null lines and each surface point. The interference image is formed using a series of short duration pulses. The number of lines is determined by using an auxiliary image of smaller interference lines whose separation is equal to or a multiple of the main pattern line separation and which is intermittently scanned.