TRASDUTTORE ESTENSIMETRICO A SEMICONDUTTORI

The extension transducer comprises a cylindrical box (1) with a tube (2) attached to one end to provide a pressure supply (P). The other face of the box carries the sensitive element (3). The element comprises a substrate of monocrystalline sapphire with epitaxial resistances formed of silicon on th...

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Hauptverfasser: VLADIMIR EMELYANOVICH BEIDEN, VLADIMIR MIKHAILOVICH KARNEEV, MIKHAIL VASILIEVICH SUROVIKOV, VLADIMIR MIKHAILOVICH STUCHEBNIKOV VIKTOR VLADIMIROVICH KHASIKOV, GEORGY GENRYKHOVICH JORDAN, ALEXEI VASILIEVICH BELOGLAZOV, VLADIMIR SERGEEVICH PAPKOV
Format: Patent
Sprache:ita
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