Apparato e metodo per l'assemblaggio automatizzato di una testa di misura

An apparatus for the automated assembly of a probe head for testing electronic devices integrated on a semiconductor wafer, includes a support adapted to support at least two parallel guides, which are provided with a plurality of respective guides holes, and at least one holding means adapted to ho...

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Bibliographische Detailangaben
Hauptverfasser: DELETTRE, Anne, PERROCHEAU, Florent, SUBRANNI, Roberto, PERREAU, Jocelyn, HERIBAN, David, VILLAIN, Jean-Christophe
Format: Patent
Sprache:ita
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Beschreibung
Zusammenfassung:An apparatus for the automated assembly of a probe head for testing electronic devices integrated on a semiconductor wafer, includes a support adapted to support at least two parallel guides, which are provided with a plurality of respective guides holes, and at least one holding means adapted to hold a contact probe to be housed in the guides holes, of the guides. Suitably, the support is a movable support adapted to be moved according to a preset trajectory between a first position, wherein the contact probe is held by the holding means at a predetermined position outside the guides holes, and a second position wherein the contact probe, which is held at the predetermined position, is housed in a set of guides holes that are substantially concentric to each other.