Elemento strutturale micromeccanico

A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical componen...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: SCHWENK, CHRISTOF, SCHMITZ, VOLKER, BREITLING, ACHIM, KUEPPERS, HARTMUT, SCHITTENHELM, NICOLE
Format: Patent
Sprache:ita
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Beschreibung
Zusammenfassung:A micromechanical component having a main extension plane is provided; the micromechanical component encloses a first cavern and a second cavern, and a first pressure prevails in the first cavern while a second pressure prevails in the second cavern, and a first layer of the micromechanical component, which extends essentially parallel to the main extension plane, projects into a second layer of the micromechanical component, which extends essentially parallel to the main extension plane, between the first cavern and the second cavern, essentially in a perpendicular direction to the main extension plane.