TRASDUTTORE MICROELETTROMECCANICO BASATO SU TRINCEA E METODO DI FABBRICAZIONE DEL TRASDUTTORE MICROELETTROMECCANICO

A microelectromechanical transducer (1; 20; 30; 50), comprising: a semiconductor body (2), having a first surface (2a) and a second surface (2b) opposite to one another; a first structural body (8), coupled to the first surface (2a) of the semiconductor body (2); a first sealed cavity (10) between t...

Ausführliche Beschreibung

Bibliographische Detailangaben

Hauptverfasser:	ABBASI GAVARTI, MOHAMMAD, ROSELLI, GIUDITTA, POMARICO, ANNA ANGELA, CALTABIANO, DANIELE
Format:	Patent
Sprache:	ita
Schlagworte:	ELECTRICITY
Online-Zugang:	Volltext bestellen
Tags:	Tag hinzufügen Keine Tags, Fügen Sie den ersten Tag hinzu!