TRASDUTTORE MICROELETTROMECCANICO BASATO SU TRINCEA E METODO DI FABBRICAZIONE DEL TRASDUTTORE MICROELETTROMECCANICO

TRASDUTTORE MICROELETTROMECCANICO BASATO SU TRINCEA E METODO DI FABBRICAZIONE DEL TRASDUTTORE MICROELETTROMECCANICO

A microelectromechanical transducer (1; 20; 30; 50), comprising: a semiconductor body (2), having a first surface (2a) and a second surface (2b) opposite to one another; a first structural body (8), coupled to the first surface (2a) of the semiconductor body (2); a first sealed cavity (10) between t...

Ausführliche Beschreibung

Gespeichert in:
Bibliographische Detailangaben
Hauptverfasser: ABBASI GAVARTI, MOHAMMAD, ROSELLI, GIUDITTA, POMARICO, ANNA ANGELA, CALTABIANO, DANIELE
Format: Patent
Sprache:ita
Schlagworte:
ELECTRICITY
Online-Zugang:Volltext bestellen
Tags: Tag hinzufügen
Keine Tags, Fügen Sie den ersten Tag hinzu!
Beschreibung
Zusammenfassung:A microelectromechanical transducer (1; 20; 30; 50), comprising: a semiconductor body (2), having a first surface (2a) and a second surface (2b) opposite to one another; a first structural body (8), coupled to the first surface (2a) of the semiconductor body (2); a first sealed cavity (10) between the semiconductor body (2) and the first structural body (8); and an active area (7) housed in the first sealed cavity (10), including at least two trenches (4; 34) and a sensor element (6a-6d; 60) between the trenches (4; 34). The trenches (4; 34) extend along a vertical direction (Z) from the first surface (2a) towards the second surface (2b) of the semiconductor body (2).