SMORZATORE DI VIBRAZIONI PER POMPE DI VUOTO

The present invention relates to a vibration damper for vacuum pumps, in particular turbomolecular vacuum pumps. Advantageously, in the vibration damper (101) according to the invention, the vacuum tightness function and the vibration damping function are both performed by the same component, in particular by one ore more toroidal rings (126, 131) made of elastic material, preferably of an elastomer. Said elastic rings (126, 131) pass from a first resting condition when the vacuum pump is not operating and the damper is at atmospheric pressure, to a second compressed condition when the vacuum pump is operating and the damper is under vacuum conditions. In this second compressed condition said elastic rings (126, 131), due to the compression force they are subjected to, become deformed in such a manner as to avoid any metal-to-metal contact between the vacuum pump and the vacuum chamber to which said pump is connected through the damper according to the invention. The absence of any metal-to-metal contact allows attaining a high damping factor as well as electrically insulating the vacuum chamber form the pump chamber. Moreover, the damper according to the invention uses a limited number of components easy to be produced, and has a reduced axial size.