Capacitive micromachined ultrasonic transducer

Systems, devices, and methods relating to a capacitive machined ultrasound transducer (CMUT) are provided. The CMUT includes an electrode and a plate covering the electrode to form a cavity. The electrode is a contoured electrode and/or the plate is a contoured plate. A voltage applied across the el...

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Bibliographische Detailangaben
Hauptverfasser:	PARK Kwan-Kyu, MA Bo, KHURI-YAKUB Butrus T, FLAHERTY R. Maxwell, FLAHERTY J. Christopher, STEDMAN George Quintin, ERGUN Arif Sanli, TOUMA Gerard
Format:	Patent
Sprache:	eng ; heb
Schlagworte:	INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIRCHEMICAL OR PHYSICAL PROPERTIES MEASURING PHYSICS TESTING
Online-Zugang:	Volltext bestellen
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Beschreibung
Zusammenfassung:	Systems, devices, and methods relating to a capacitive machined ultrasound transducer (CMUT) are provided. The CMUT includes an electrode and a plate covering the electrode to form a cavity. The electrode is a contoured electrode and/or the plate is a contoured plate. A voltage applied across the electrode and the plate deflects the plate. The cavity is a non-uniform cavity spacing between the plate and the electrode, with the cavity spacing being largest within a central region of the plate.