Detector inspection device, detector assembly, detector array, apparatus, and method

Detector inspection device, detector assembly, detector array, apparatus, and method

The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: RODRIGUES MANSANO Andre Luis, VAN LEEUWEN Richard Michel, SEEKLES Duije, LOOIJE Alexius Otto, STEENSTRA Herre Tjerk, WIELAND Marco Jan-Jaco, MARISSEN Roelof Albert, VAN T VEEN Gretchen Ren?e, VISSER Erwin Robert Alexander
Format: Patent
Sprache:eng ; heb
Schlagworte:
BASIC ELECTRIC ELEMENTS
ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
ELECTRICITY
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Beschreibung
Zusammenfassung:The embodiments of the present disclosure provides a detector inspection device for interrogating at least part of a detector comprised in a charged particle-optical assessment apparatus, the detector inspection device comprising: a coupler configured to be positioned proximate to a detector element of a detector; and a device controller configured to apply a stimulating signal to the coupler to stimulate a response signal in the detector for interrogating at least part of the detector.