Uv reflective mirrors for display fabrication

An apparatus is disclosed which includes an ultraviolet laser and at least one reflective mirror having a substrate which is made from beryllium, an aluminum metal matrix, or silicon carbide. The at least one mirror is adapted to reflect a laser beam generated from the ultraviolet laser, which can t...

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Bibliographische Detailangaben
Hauptverfasser: Edgar E. VIDAL, Jason R. CLUNE, Ki-Sung SONG, Hunho LEE, Kyung H. CHUNG
Format: Patent
Sprache:eng ; heb
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Beschreibung
Zusammenfassung:An apparatus is disclosed which includes an ultraviolet laser and at least one reflective mirror having a substrate which is made from beryllium, an aluminum metal matrix, or silicon carbide. The at least one mirror is adapted to reflect a laser beam generated from the ultraviolet laser, which can then be used on a silicon film used in the production of an electronic display. The laser beam can be used to anneal the silicon film, or in a laser lift-off process for separating the silicon film from a temporary substrate upon which the silicon film was mounted.