Optical rotation angle measuring system

The present invention is directed to an optical system for measuring the rotation angle of rotatable object having a rotation shaft (2), which system comprises a reflective diffraction element (6) mounted on said shaft and a module that includes a radiation source (8) emitting a monochromatic beam (...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser: VELZEL Christiaan H.F, VAN DER KLUIT Rinze Frederik, HARTMANN Martin, GUGGENMOS Markus, KIESBAUER Bernhard, PEKELDER Sven
Format: Patent
Sprache:eng ; heb
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Beschreibung
Zusammenfassung:The present invention is directed to an optical system for measuring the rotation angle of rotatable object having a rotation shaft (2), which system comprises a reflective diffraction element (6) mounted on said shaft and a module that includes a radiation source (8) emitting a monochromatic beam (bo) towards this element and a radiation-sensitive detection structure (14, 16), the diffraction element is configured to project diffraction order images (18) of its pattern onto associated sections (50(1)-54(2)) of an annular grating structure forming part of the detection structure and the surface size of the diffraction element is smaller than 20% of the surface size of the annular grating structure.