GLASS-CERAMICS SUITABLE FOR DIELECTRIC SUBSTRATES

This invention is directed to the production of glass-ceramic materials especially designed for substrates in integrated circuit packaging. The glass-ceramics can be prepared from thermally crystallizable glasses that can be sintered into an integral glass-ceramic having a dielectric constant less t...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	HOLLERAN, LOUIS MICHAEL, MARTIN, FRANCIS WILLIS
Format:	Patent
Sprache:	eng
Schlagworte:	BASIC ELECTRIC ELEMENTS CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS CHEMICAL COMPOSITION OF GLASSES, GLAZES, OR VITREOUSENAMELS CHEMISTRY ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR ELECTRICITY GLASS JOINING GLASS TO GLASS OR OTHER MATERIALS MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS METALLURGY MINERAL OR SLAG WOOL PRINTED CIRCUITS SEMICONDUCTOR DEVICES SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS,MINERALS OR SLAGS SURFACE TREATMENT OF GLASS
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Beschreibung
Zusammenfassung:	This invention is directed to the production of glass-ceramic materials especially designed for substrates in integrated circuit packaging. The glass-ceramics can be prepared from thermally crystallizable glasses that can be sintered into an integral glass-ceramic having a dielectric constant less than 6 and containing willemite as the predominant crystal phase. The overall composition of the glass-ceramic consists essentially, in weight percent of 15-45% ZnO, 10-30% Al2O3, and 30-55% SiO2. Where desired, a nucleating agent selected from the group consisting of 8-12% ZrO2 and 0.001-0.05% of a noble metal selected from the group consisting of Au, Pd, and Pt may be included.