SEMICONDUCTOR SUBSTRATE CONTACT VIA

Edges of a first conductive layer (104) and a silicate glass layer (106) extend adjacent one another along a via (164) extending to a semiconductor substrate (41). An electrical conductor (112/114) extends through the via (164) into contact with the semiconductor substrate (41).

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Bibliographische Detailangaben
Hauptverfasser: MIKULAN, PAUL, I, BURTON, GREGORY, N
Format: Patent
Sprache:eng
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Zusammenfassung:Edges of a first conductive layer (104) and a silicate glass layer (106) extend adjacent one another along a via (164) extending to a semiconductor substrate (41). An electrical conductor (112/114) extends through the via (164) into contact with the semiconductor substrate (41).