Vapor deposited photoresists of anionically polymerizable monomers

A relief image is prepd. by (a) providing a substrate whose surface activates polymerisation of a monomer of formula CHR = CXY (I) (X, Y = strong electron withdrawing gps., and R = H, or, when X and Y are both CN, 1-4C alkyl), (b) treating the substrate surface with a photosensitive cpd. which relea...

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Bibliographische Detailangaben
Hauptverfasser:	JOHN G. WOODS, JOHN M. ROONEY
Format:	Patent
Sprache:	eng
Schlagworte:	APPARATUS SPECIALLY ADAPTED THEREFOR AUXILIARY PROCESSES IN PHOTOGRAPHY BASIC ELECTRIC ELEMENTS CHEMISTRY CINEMATOGRAPHY COMPOSITIONS BASED THEREON ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR ELECTRICITY ELECTROGRAPHY HOLOGRAPHY MACROMOLECULAR COMPOUNDS OBTAINED BY REACTIONS ONLY INVOLVINGCARBON-TO-CARBON UNSATURATED BONDS MATERIALS THEREFOR METALLURGY ORGANIC MACROMOLECULAR COMPOUNDS ORIGINALS THEREFOR PHOTOGRAPHIC PROCESSES, e.g. CINE, X-RAY, COLOUR,STEREO-PHOTOGRAPHIC PROCESSES PHOTOGRAPHY PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES,e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTORDEVICES PHOTOSENSITIVE MATERIALS FOR PHOTOGRAPHIC PURPOSES PHYSICS SEMICONDUCTOR DEVICES THEIR PREPARATION OR CHEMICAL WORKING-UP
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Beschreibung
Zusammenfassung:	A relief image is prepd. by (a) providing a substrate whose surface activates polymerisation of a monomer of formula CHR = CXY (I) (X, Y = strong electron withdrawing gps., and R = H, or, when X and Y are both CN, 1-4C alkyl), (b) treating the substrate surface with a photosensitive cpd. which releases an acid on exposure to active or ionising radiation; (c) imagewise exposing the substrate to release the acid; and (d) treating the substrate with vapours of monomer (I) to form a polymeric coating in the unexposed areas. An article, pref. a SiO2 coated Si wafer, carrying an image prepd-. as above is also claiied.