Vacuum pump

Disclosed is a vacuum pump comprising a stator 114, the stator comprising one or more stator walls defining a pumping chamber, and a heat transfer device 130 coupled to the one or more stator walls, the heat transfer device comprising, a thermally conductive body, and a conduit 132 through the therm...

Ausführliche Beschreibung

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Bibliographische Detailangaben
Hauptverfasser:	Matthew Richard Wickes, YoungMin Kim, Michael Henry North, Cainan Long, YoungHyun You, Wonsik Song, Sivabalan Kailasam
Format:	Patent
Sprache:	eng
Schlagworte:	BLASTING HEATING LIGHTING MECHANICAL ENGINEERING POSITIVE DISPLACEMENT MACHINES FOR LIQUIDS PUMPS FOR LIQUIDS OR ELASTIC FLUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTMACHINES FOR LIQUIDS ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENTPUMPS WEAPONS
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Beschreibung
Zusammenfassung:	Disclosed is a vacuum pump comprising a stator 114, the stator comprising one or more stator walls defining a pumping chamber, and a heat transfer device 130 coupled to the one or more stator walls, the heat transfer device comprising, a thermally conductive body, and a conduit 132 through the thermally conductive body and through which, in use, a purge gas 140 is passed whereby to heat the purge gas. The heat transfer device may be connected to an external surface of the stator and the conduit may comprise a pipe embedded in the thermally conductive body. The heat transfer pipe may include heaters and/or channels for cooling fluids, the heaters and cooling channels may be arranged in separate layers of the thermally conductive body. The purge gas may pass through the heat transfer device such that the inlet is closer to the vacuum side/end of the stator than the outlet. Also claimed are a system and method using the purge gas for cooling.