Ion generation device for straight tube square electromagnetic ion implantation equipment

An ion generation device for straight tube square electromagnetic ion implantation equipment, which belongs to the technical field of ion implantation. Said device comprises an ion sputtering housing (2) having a straight tube square-shaped cavity, one end of the straight tube square-shaped cavity being closed, and the other end of the straight tube square-shaped cavity being an ion outlet (5); two mounting surfaces (21) forming a certain included angle are arranged at the closed end of the ion sputtering housing (2); a set of cathode arc source assemblies (1) are arranged on each of the two mounting surfaces (21); an ion extraction assembly (4), a mass analysis device (6), and an acceleration pipe (7) are sequentially arranged at one side of the ion outlet (5); uncharged particles move at their own speed and direction and are deposited on an inner wall of the ion sputtering housing (2), and charged metal ions are focused and accelerated under the action of a magnetic field, and pass through the ion outlet (5). The rate of ionization is improved, and also the ion sputtering housing (2) having the straight tube square-shaped cavity is large in size, travel is short, and the rate of deposition is greatly improved.