CFET with independent gate control and low parasitic capacitance

A semiconductor structure is provided that includes a second nanosheet device of a second conductivity type stacked over a first nanosheet device of a first conductivity type that is different from the second conductivity type. Each of the first and second nanosheet devices includes at least one sem...

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Bibliographische Detailangaben
Hauptverfasser: Juntao Li, Ruilong Xie, Kangguo Cheng, Carl Radens
Format: Patent
Sprache:eng
Schlagworte:
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Beschreibung
Zusammenfassung:A semiconductor structure is provided that includes a second nanosheet device of a second conductivity type stacked over a first nanosheet device of a first conductivity type that is different from the second conductivity type. Each of the first and second nanosheet devices includes at least one semiconductor channel material nanosheet. One side of the least one semiconductor channel material nanosheet of both the first and second nanosheet devices contacts a dielectric material, while another side of the least one semiconductor channel material nanosheet of both the first and second nanosheet devices contacts a functional gate-containing liner that extends laterally to connect to a gate contact of each first and second nanosheet device.