Magnetic bearing and vacuum pump
A magnetic bearing 100 for a vacuum pump, in particular a turbomolecular pump, comprises a radial permanent magnetic bearing and an electromagnetic axial bearing. The radial bearing has a static magnetic element 104 and a rotated magnetic element 102 arranged radially next to each other and in mutua...
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Format: | Patent |
Sprache: | eng |
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Zusammenfassung: | A magnetic bearing 100 for a vacuum pump, in particular a turbomolecular pump, comprises a radial permanent magnetic bearing and an electromagnetic axial bearing. The radial bearing has a static magnetic element 104 and a rotated magnetic element 102 arranged radially next to each other and in mutual repulsion, and a terminal ring 108 attached axially next to the rotated magnetic element. The axial bearing comprises an electromagnet 114, and the terminal ring comprises a radial protrusion 110 arranged next to the electromagnet such that an axial magnetic force can be applied to the protrusion. A sensor coil may be arranged axially next to the protrusion to detect the radial position thereof. A bias magnet may be arranged at least partially axially next to the protrusion to apply a bias force to the axial bearing. A static terminal ring may be attached axially next to the static magnetic element, and a conductive disk may be connected to the static terminal ring and at least partially arranged axially next to the rotated magnetic element such that eddy currents are induced into the conductive disk by the magnetic field of the rotated magnetic element. |
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