A layered structure
An epitaxial pseudomorphic deformation control layer 16 is arranged between a semiconductor substrate 12 and device layers 14 so that a sum of the first, second and third deformation in the substrate, deformation control layer and a device layer matches a target level of deformation. The semiconduct...
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| Zusammenfassung: | An epitaxial pseudomorphic deformation control layer 16 is arranged between a semiconductor substrate 12 and device layers 14 so that a sum of the first, second and third deformation in the substrate, deformation control layer and a device layer matches a target level of deformation. The semiconductor layer structure has a controlled, known deformation which can be compressive, tensile or zero. The layer structure can be used to fabricate LEDs, VCSELs and photodiodes. |
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