Inlet nozzle assembly

An inlet nozzle assembly 600A, 600B is suitable for an abatement apparatus 10 treating an effluent stream from a semiconductor processing tool. An enclosure 610 defines an abatement or combustion chamber 120 and a mount 50 receives a nozzle 640A, 650A extending from the mount which delivers the effluent stream into the abatement chamber. An upstream inlet portion 700A may define an inlet chamber with a downstream portion defining a delivery chamber 710A. An upstream body may comprise the inlet portion and a part of a delivery portion, with a length of the delivery portion dimensioned to deliver a selected flow profile of effluent stream into the abatement chamber. The upstream body may be formed of a material with a lower use temperature and lower oxidation resistance than the material of the downstream body. The inlet nozzle assemblies may have differing lengths. A discontinuity 680A may separate the effluent stream into a pair of vortices. An abatement apparatus and a method of mounting a nozzle to an abatement chamber are also claimed.